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The Importance of Probes for Semiconductor Chip Inspection

Understanding Probes

Semiconductor chip production steps mainly include design, manufacturing and packaging. Semiconductor probes play a very important role in the entire chip production process, and are mainly used in chip design verification, wafer testing and finished product testing. probe test system Therefore, probes can be regarded as the core components throughout the entire chip production process.

Probes are generally composed of four basic parts: the head, the tail, the spring and the outer tube. These parts are formed after riveting and pre-pressing by precision instruments. Due to the tiny size of semiconductor products, the dimensional requirements for probes have reached the micron level.

Probes are used to realize the precision connection between wafer/chip pins or solder balls and testers to transmit signals and detect performance indicators such as product conductivity, current, function and aging.

The quality of the probes directly affects the testing accuracy, which in turn affects the testing and verification results of semiconductor chip products.RF probes Therefore, it is necessary to ensure that the structure of the probes is reasonable, the dimensional error is within the acceptable range, the needles do not have the original skew, and the peripheral insulation layer of the common probes is intact during the production process.

Detection difficulties

Due to the small size of the probe itself, the precision of the vision system is required to be higher. At the same time, the rationality of the overall structure of the probe also needs to be inspected, and the field of view of the inspection is also highly required. In addition, in order to prevent corrosion and enhance stability and durability, the outside of the probe is usually gold-plated, resulting in strong reflection on the outside of the probe, which the vision system needs to overcome.

Inspection requirements

This customer is a customer in the probe industry,probe card and requested to verify the field of view effect of the recommended solution, to verify whether the minimum magnification field of view has dark corners, and whether the maximum magnification imaging effect meets the requirements.

The specific configuration of the recommended program is: Mutoh 12:1 built-in micro-adjustable auto-magnification lens + 2 times the barrel + 0.5 times the additional mirror, the light source for the red external coaxial light.

Measurement results

In the test, the minimum magnification field of view is 17mm, the maximum magnification field of view is 21mm, the minimum magnification field of view has no dark corners, the maximum magnification imaging effect is clear and high contrast.

Program Core

The built-in micro-adjustable auto-magnification lens is the core of the program. The Mouton Light auto-magnification lens utilizes a linear guide motion pattern, which reduces friction loss and improves service life. It features high resolution, high contrast, and low distortion (less than 0.012%) to enhance inspection accuracy. In addition, the built-in micro-adjustable zoom lens features a built-in micro-adjustable zoom system that can meet more demanding application scenarios. The solution also provides a wealth of configuration resources and modular products, you can freely combine the configuration according to the needs of the most suitable optical system to choose the solution.